Title:
An onium compound and a synthesizing method for the same
Document Type and Number:
Japanese Patent JP6144164
Kind Code:
B2
Abstract:
New onium salt compounds and methods for synthesis of such compounds are provided. Preferred methods of the invention include (a) providing an onium salt compound comprising a sulfonate component having an electron withdrawing group; and (b) treating the onium salt compound with a halide salt to form a distinct salt of the onium compound. The present onium compounds are useful as an acid generator component of a photoresist composition.
More Like This:
Inventors:
Paul Jay Laboume
Application Number:
JP2013190009A
Publication Date:
June 07, 2017
Filing Date:
September 13, 2013
Export Citation:
Assignee:
Rohm and Haas Electronic Materials LLC
International Classes:
C07C25/18; C07C381/12; C07D335/16; G03F7/004
Domestic Patent References:
| JP2009221195A |
Foreign References:
| WO2003074509A1 | ||||
| WO2011070947A1 |
Other References:
Bull.Chem.Soc.Jpn.Vol.80,No.7,1413-1417(2007)
Attorney, Agent or Firm:
Patent Business Corporation Sender International Patent Office
Previous Patent: An eaves gutter joint and the connection structure of an eaves gutter
Next Patent: MANUFACTURE OF ZR PLATE HAVING SUPERIOR BENDABILITY
Next Patent: MANUFACTURE OF ZR PLATE HAVING SUPERIOR BENDABILITY