Title:
光学装置
Document Type and Number:
Japanese Patent JP7175816
Kind Code:
B2
Abstract:
To increase the drive force of an actuator that tilts an optical path varying part.SOLUTION: An optical device 100 includes: a mirror part 30; a pair of first linking parts 41, 41 extending from either side of the mirror part 30 along a Y axis; a first movable frame body 50 surrounding the mirror part 30 inside and linked to the first linking part 41; a pair of second linking parts 42, 42 extending from either side of the first movable frame 50 along an X axis; a second movable frame body 60 surrounding the first movable frame 50 inside and linked to the second linking part 42; a first actuator 70 disposed straddling the first and second movable frame bodies 50, 60; and a fixed frame body 10 surrounding the second movable frame body 60 inside and linked to the second movable frame body 60. The first actuator 70 is a piezoelectric actuator that tilts the mirror part 30 around the Y axis.SELECTED DRAWING: Figure 1
Inventors:
Ryuta Araki
Application Number:
JP2019054884A
Publication Date:
November 21, 2022
Filing Date:
March 22, 2019
Export Citation:
Assignee:
Sumitomo Precision Products Co., Ltd.
International Classes:
G02B26/10; B81B3/00; B81B7/02; G02B26/08; H01L41/09; H01L41/113; H01L41/187
Domestic Patent References:
| JP2010197662A | ||||
| JP2018128514A | ||||
| JP2016118726A | ||||
| JP2013092750A | ||||
| JP2012185314A |
Foreign References:
| US20120236379 | ||||
| CN102654642A |
Attorney, Agent or Firm:
Patent Attorney Corporation Maeda Patent Office