Title:
An optical integrator, a lighting unit, a transmission light study system, an illumination-light study system, an exposure device, and a device manufacturing method
Document Type and Number:
Japanese Patent JP6183635
Kind Code:
B2
Inventors:
Inoue Kaoru
Hideki Komatsuda
Hideki Komatsuda
Application Number:
JP2012280748A
Publication Date:
August 23, 2017
Filing Date:
December 25, 2012
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
| JP2014123600A | ||||
| JP2002116379A | ||||
| JP2001135560A | ||||
| JP2007334350A | ||||
| JP2007150295A | ||||
| JP10020236A | ||||
| JP8339954A | ||||
| JP2011507293A | ||||
| JP2011503835A |
Attorney, Agent or Firm:
Takao Yamaguchi