Title:
ｐＨ調整水製造装置
Document Type and Number:
Japanese Patent JP6900975
Kind Code:
B2
Abstract:
A pH-adjusted water production device has a configuration in which a platinum group metal support resin column, a membrane-type degassing device, and a gas dissolving membrane device are provided on an ultra-pure water supply line, and a pH-adjuster injection device is provided between the platinum group metal support resin column and the membrane-type degassing device. An inert gas source is connected to the gas phase side of the membrane-type degassing device while an inert gas source is connected also on the gas phase side of the gas dissolving membrane device, and a discharge line communicates with the gas dissolving membrane device.
Inventors:
Hideaki Iino
Application Number:
JP2019109577A
Publication Date:
July 14, 2021
Filing Date:
June 12, 2019
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
C02F1/66; B01D61/00; B01D61/58; B01F1/00; B01F3/04; B01F5/10; C02F1/42; C02F1/44; C02F1/70
Domestic Patent References:
| JP2018167230A | ||||
| JP2018049872A | ||||
| JP2011072950A | ||||
| JP2007000699A |
Attorney, Agent or Firm:
Yuji Hayakawa
Keisuke Murasame
Keisuke Murasame