Title:
PARTICLE MEASURING DEVICE AND PARTICLE MEASURING METHOD
Document Type and Number:
Japanese Patent JP2017003385
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a particle measuring device and a particle measuring method using a condensation nucleus method capable of detecting microscopic particles in sampling gas with a high detection rate even when the sampling gas flows at a large flow rate.SOLUTION: A particle measuring device comprises: a condensation section 1 where sampling gas including microscopic particles is introduced thereinto, saturated vapor is produced therein and condensation particles are generated in a manner that allows vapor molecules in the saturated vapor to be condensed with the microscopic particles in the sampling gas as nuclei; and a particle measuring section 3 which measures the number of the microscopic particles by measuring the number of condensation particles generated in the condensation section 1. The condensation section 1 has: a plurality of condensation pipes 11 which generate the condensation particles; and a vapor production section 12 which produces the vapor in the plurality of condensation pipes 11. The condensation particles generated in the plurality of condensation pipes 11 are introduced into the particle measuring section 3 to count the number thereof.SELECTED DRAWING: Figure 1
Inventors:
IKEDA KYOKO
FUJIWARA KAORU
TSUJIMOTO KAZUYA
MOCHIZUKI NORITAKA
FUJIWARA KAORU
TSUJIMOTO KAZUYA
MOCHIZUKI NORITAKA
Application Number:
JP2015116588A
Publication Date:
January 05, 2017
Filing Date:
June 09, 2015
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
G01N15/14; G01N15/00; G01N15/06
Attorney, Agent or Firm:
Hiroshi Takayama
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