Pattern formation method and electronic device manufacturing method

Title:

Pattern formation method and electronic device manufacturing method

Document Type and Number:

Japanese Patent JP6340304

Kind Code:

B2

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Inventors:

Yuichiro Enomoto
Ryosuke Ueba
Shirakawa Mitsuhiro
Furuya Hajime
Kenyo Goto
Masashi Kojima

Application Number:

JP2014232526A

Publication Date:

June 06, 2018

Filing Date:

November 17, 2014

Export Citation:

Assignee:

FUJIFILM Corporation

International Classes:

G03F7/40; G03F7/038; G03F7/039; G03F7/095; G03F7/26; H01L21/027

Domestic Patent References:

Foreign References:

WO2010047340A1
WO2012157433A1

Attorney, Agent or Firm:

Patent Business Corporation Koei Patent Office
Takeshi Takamatsu
Toshiyuki Ozawa

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