Title:
評価用パターンを形成したフォトマスクおよびムラ検査装置の性能評価方法
Document Type and Number:
Japanese Patent JP5556071
Kind Code:
B2
Inventors:
Hiroki Katsube
Mitsuhashi Mitsuyuki
Takashi Sugano
Tsukasa Fujimoto
Naoki Yoshida
Mitsuhashi Mitsuyuki
Takashi Sugano
Tsukasa Fujimoto
Naoki Yoshida
Application Number:
JP2009162591A
Publication Date:
July 23, 2014
Filing Date:
July 09, 2009
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G03F1/44; G01N21/956; G03F1/70; G03F1/84; H01L21/027