感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法

Title:

感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法

Document Type and Number:

Japanese Patent JP5140354

Kind Code:

B2

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Inventors:

Kawanishi Andai
Kenji Wada

Application Number:

JP2007239577A

Publication Date:

February 06, 2013

Filing Date:

September 14, 2007

Export Citation:

Assignee:

FUJIFILM Corporation

International Classes:

G03F7/004; G03F7/038; G03F7/039; H01L21/027; C07D333/76; C07D339/08

Domestic Patent References:

Foreign References:

EP1693705A2

Attorney, Agent or Firm:

Takeshi Takamatsu
Toshiyuki Ozawa
Hasegawa Hiromichi

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