Title:
感光性樹脂組成物、並びにこれを用いた感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
Document Type and Number:
Japanese Patent JP5327310
Kind Code:
B2
Abstract:
Disclosed is a photosensitive resin composition comprising (A) a binder polymer, (B) a photopolymerizable compound, (C) a photopolymerization initiator and (D) a sensitizing dye, wherein the binder polymer (A) has a constituent unit derived from (meth)acrylic acid and a constituent unit derived from (meth)acrylic acid benzyl ester or a (meth)acrylic acid benzyl ester derivative, the photopolymerizable compound (B) comprises a compound having one ethylenically unsaturated bond, and the sensitizing dye (D) comprises a compound represented by general formula (1). In formula (1), R1 and R2 independently represent a substituted or unsubstituted phenyl, thienyl or furyl group; R3 represents an alkyl group having 1 to 10 carbon atoms, an alkoxy group having 1 to 10 carbon atoms, or an alkylester group having 1 to 10 carbon atoms; a and b independently represent an integer of 0 to 2; and m represents an integer of 0 to 5.
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Inventors:
Miyasaka Masahiro
Yukiko Muramatsu
Yukiko Muramatsu
Application Number:
JP2011501540A
Publication Date:
October 30, 2013
Filing Date:
February 03, 2010
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
G03F7/033; C08F2/50; C08F220/06; C08F290/06; G03F7/004; G03F7/027; G03F7/031; H05K3/06; H05K3/18
Domestic Patent References:
| JP2007122028A | 2007-05-17 | |||
| JP2007279381A | 2007-10-25 | |||
| JP2007102184A | 2007-04-19 | |||
| JP2009229655A | 2009-10-08 |
Foreign References:
| WO2007097306A1 | 2007-08-30 | |||
| WO2008078483A1 | 2008-07-03 | |||
| WO2007097306A1 | 2007-08-30 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Hiroyuki Hirano
Yoshinori Shimizu
Hiroyuki Hirano