Title:
感光性樹脂組成物及び液体吐出ヘッド
Document Type and Number:
Japanese Patent JP5473645
Kind Code:
B2
Inventors:
Ken Ikegame
Masako Shimomura
Takahashi table
Masako Shimomura
Takahashi table
Application Number:
JP2010024683A
Publication Date:
April 16, 2014
Filing Date:
February 05, 2010
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/004; C08G59/08; C08G65/18; G03F7/038; H01L21/027
Domestic Patent References:
| JP2009244779A | ||||
| JP2008065161A | ||||
| JP2008020841A | ||||
| JP2008310089A |
Foreign References:
| WO2010001919A1 |
Attorney, Agent or Firm:
Akio Miyazaki
Ishibashi Masayuki
Masaaki Ogata
Ishibashi Masayuki
Masaaki Ogata