Title:
物理量センサ
Document Type and Number:
Japanese Patent JP7403069
Kind Code:
B2
Abstract:
A physical quantity sensor includes a substrate, an anchor portion, a surrounding portion, a detecting element, a moving portion, and a beam portion. The anchor portion is formed on the same side as a principal surface of the substrate and fixed to the substrate. The surrounding portion is formed on the same side as the principal surface of the substrate and surrounds the anchor portion. The detecting element detects a physical quantity as a target of detection. The moving portion is provided with at least a part of the detecting element, formed on the same side as the principal surface of the substrate, and connected to the surrounding portion. The beam portion is formed on the same side as the principal surface of the substrate and connects the anchor portion and the surrounding portion together.
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Inventors:
Takanori Aoyagi
Hiroyuki Aizawa
Dong Chunshi
Shinichi Kishimoto
Hiroyuki Aizawa
Dong Chunshi
Shinichi Kishimoto
Application Number:
JP2021508794A
Publication Date:
December 22, 2023
Filing Date:
February 19, 2020
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
G01C19/5769; G01C19/5783
Domestic Patent References:
| JP2013145231A | ||||
| JP2017533646A | ||||
| JP2010523954A | ||||
| JP2019023618A |
Foreign References:
| WO2018135211A1 |
Attorney, Agent or Firm:
Hokuto Patent Attorneys Office