Title:
圧電振動デバイス
Document Type and Number:
Japanese Patent JP7305971
Kind Code:
B2
Abstract:
To provide a piezoelectric vibration device capable of suppressing damage to an excitation electrode and the like during marking.SOLUTION: In a piezoelectric vibrating device 100, a first sealing member and a crystal vibrating plate are bonded. In the piezoelectric vibrating device 100, a second sealing member and the crystal vibrating plate are bonded to each other so that an internal space is provided that hermetically seals a vibrating portion 11 of the crystal diaphragm including a first excitation electrode 111 and a second excitation electrode. A first metal film 22 is formed on a first main surface 201 of the first sealing member. The first metal film 22 is provided with a marking area M1 capable of printing a character on a surface of the first metal film 22. In the marking area M1, the first excitation electrode 111 and the second excitation electrode are provided so as not to overlap with each other in a plan view.SELECTED DRAWING: Figure 8
Inventors:
Hiroki Yoshioka
Koji Nakamura
Koji Nakamura
Application Number:
JP2019015951A
Publication Date:
July 11, 2023
Filing Date:
January 31, 2019
Export Citation:
Assignee:
Great Vacuum Co., Ltd.
International Classes:
H03H9/02; H01L23/00; H03H9/19
Domestic Patent References:
| JP2010252051A | ||||
| JP2004297348A | ||||
| JP201785412A | ||||
| JP201385170A |
Foreign References:
| WO1997002596A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation ARK Office