Title:
A plasma emission device and the electromagnetic wave generation machine used for it
Document Type and Number:
Japanese Patent JP6282811
Kind Code:
B2
Abstract:
A plasma emission device 1 in an embodiment includes: an electromagnetic wave generator 2; a waveguide 4 that transmits an electromagnetic wave emitted from the electromagnetic wave generator 2; an antenna 5 that receives the electromagnetic wave transmitted through the waveguide 4; an electromagnetic wave focuser 6 that is irradiated with the electromagnetic wave from the antenna 5; and an electrodeless bulb 7 disposed in the electromagnetic wave focuser 6. A light-emitting material filled in the electrodeless bulb 7 is excited by the electromagnetic wave focused by the electromagnetic wave focuser 6 to perform plasma emission. The electromagnetic wave generator 2 includes a cathode part and an anode part A maximum output efficiency of the electromagnetic wave to be generated with an input power of 700 W or less is 70% or more.
Inventors:
Naoya Kato
Application Number:
JP2013142587A
Publication Date:
February 21, 2018
Filing Date:
July 08, 2013
Export Citation:
Assignee:
Toshiba Hokuto Electronics Co., Ltd.
International Classes:
H01J65/04; H01J25/587
Domestic Patent References:
| JP10050224A | ||||
| JP2007335351A | ||||
| JP2007184274A | ||||
| JP2005085685A | ||||
| JP2007115534A | ||||
| JP2007273377A |
Foreign References:
| WO2012004557A1 |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office
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