Title:
A polish monitor method and a polish device
Document Type and Number:
Japanese Patent JP6050571
Kind Code:
B2
Inventors:
Taro Takahashi
Application Number:
JP2011173792A
Publication Date:
December 21, 2016
Filing Date:
August 09, 2011
Export Citation:
Assignee:
Ebara Corporation
International Classes:
G01B7/06; B24B49/04; B24B49/10; H01L21/304
Domestic Patent References:
| JP200999842A | ||||
| JP2002118084A | ||||
| JP2008304471A | ||||
| JP2002148010A | ||||
| JP2005121616A | ||||
| JP2012506152A |
Attorney, Agent or Firm:
Isamu Watanabe
Tetsuya Hirosawa
Tetsuya Hirosawa