Title:
A position control apparatus and a position control method
Document Type and Number:
Japanese Patent JP6245808
Kind Code:
B2
Inventors:
Hideya Tanaka
Application Number:
JP2013013105A
Publication Date:
December 13, 2017
Filing Date:
January 28, 2013
Export Citation:
Assignee:
Canon Inc
International Classes:
G05D3/00; G01D5/249
Domestic Patent References:
| JP5272988A |
Attorney, Agent or Firm:
Kazuo Kato