Title:
電気的試験用プローブ、それを用いた電気的接続装置、及びプローブの製造方法
Document Type and Number:
Japanese Patent JP5597385
Kind Code:
B2
Abstract:
A method for manufacturing a probed for an electrical test includes producing by a deposition technique a deposit including a probe main body portion made of a nickel-boron alloy and a probe tip portion projecting downward from the probe main body portion and made of a different conductive material from the probe main body portion. The method further includes annealing the deposit. The average grain diameter of the nickel-boron alloy is between 97 Å and 170 Å. The contained amount of boron is from 0.02 wt % to 0.20 wt %.
Inventors:
Hideki Hirakawa
Shell mound 聡
Shell mound 聡
Application Number:
JP2009263904A
Publication Date:
October 01, 2014
Filing Date:
November 19, 2009
Export Citation:
Assignee:
Japanese Micronix
International Classes:
G01R1/067; C22C19/03; C22F1/10; G01R1/073; H01L21/66; C22F1/00
Attorney, Agent or Firm:
Hidekazu Miyoshi
Masakazu Ito
Nobuyuki Matsunaga
Masakazu Ito
Nobuyuki Matsunaga