加工装置

Japanese Patent JP7452960

B2

To provide a processing device equipped with a cleaning unit, which can sufficiently clean dirt adhering to a lower surface of a work-piece.SOLUTION: Carrying-out means 5 comprises a carrying pad 50 that can move in horizontal and vertical directions, and a height position recognizing part 53 that recognizes a height position of the pad 50. A cleaning unit 4 comprises a motor 44 that rotates a cleaning member 40 extending radially from a rotation shaft 42, and a motor load current value detecting part 48. A processing device 1 comprises height position setting means 91 that sets an optimal height position for the pad 50 at the time when a lower surface of the work-piece held on the pad 50 is cleaned with the cleaning member 40. The height position setting means 91 comprises a height position memorizing part that memorizes a height position of the pad 50 recognized when load current values of the motor 44 that rise more as pressing amounts of the cleaning member 40 against the lower surface of the work-piece become larger, where the height position of the pad 50 memorized by the height position memorizing part is set as the optimal height position for the pad 50 and the lower surface of the work-piece held by the pad 50 is cleaned.SELECTED DRAWING: Figure 1

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Kotaro Nishikawa

JP2019150305A

March 19, 2024

August 20, 2019

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Disco Co., Ltd.

B24B55/06; B24B41/06; B24B49/10; H01L21/304

JP2000021828A
JP2015199158A
JP2006332534A
JP2017147275A
JP11031671A
JP2013103318A
JP2001054865A
JP2000052234A
JP2010027701A
JP2016124063A

WO2012008222A1

Patent Attorney Corporation Tokyo Alpa Patent Office

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