Title:
加工システム
Document Type and Number:
Japanese Patent JP7467611
Kind Code:
B2
Abstract:
A processing apparatus includes a holder configured to hold a processing target object; a processing mechanism to which a processing tool configured to process the processing target object held by the holder is installed in a replaceable manner; and an exterior cover accommodating the holder and the processing mechanism therein. The exterior cover includes an entrance opening through which a replacing apparatus configured to replace the processing tool passes when advancing to an inside of the exterior cover from an outside thereof. The processing apparatus further includes a shutter configured to open or close the entrance opening of the exterior cover.
Inventors:
Yasutaka Mizomoto
Susumu Hayakawa
Susumu Hayakawa
Application Number:
JP2022517591A
Publication Date:
April 15, 2024
Filing Date:
April 07, 2021
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; B23Q11/08; B24B45/00; B24B55/06
Domestic Patent References:
| JP2014205231A | ||||
| JP11274271A | ||||
| JP10340872A | ||||
| JP2015093367A | ||||
| JP2009050976A | ||||
| JP2000052185A | ||||
| JP2018192572A | ||||
| JP2017098540A | ||||
| JP8257899A | ||||
| JP2017094468A | ||||
| JP2008080409A |
Foreign References:
| US20070251922 | ||||
| WO2020049701A1 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
Previous Patent: Camptothecin derivatives and complexes thereof
Next Patent: Image processing device, image processing method, and program
Next Patent: Image processing device, image processing method, and program