Title:
A program, a generation method, a generating device, a drive, a processing device, a lithography device, and a manufacturing method of an article
Document Type and Number:
Japanese Patent JP6234170
Kind Code:
B2
Abstract:
The present invention provides a computer-readable storage medium which stores a program for causing a computer to generate time-series data of an electric current to be supplied to a motor in order to cause, a control system, including the motor configured to drive an object, to transit from a first state to a second state, the program causing the computer to generate the time-series data so as to satisfy a constraint including a condition to constrain an upper limit value of dispersion of a plurality of state quantities respectively obtained from a plurality of models each of which estimates, from the time-series data, a state quantity of a specific mode of a vibration mode and motion mode of the object, and so that a value of an evaluation function for evaluating the time-series data falls within a tolerance.
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Inventors:
Shinji Ueda
Application Number:
JP2013227536A
Publication Date:
November 22, 2017
Filing Date:
October 31, 2013
Export Citation:
Assignee:
Canon Inc
International Classes:
G05B13/02; G05D3/12
Domestic Patent References:
| JP2012050273A | ||||
| JP2011253125A | ||||
| JP2000099107A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
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