Title:
A projection aligner provided with a reflective refraction type projection optical system and it
Document Type and Number:
Japanese Patent JP6022759
Kind Code:
B2
Abstract:
A magnification projection optical system combining a catoptric system and a dioptric system is equipped with: a first optical system for forming an image using patterned light from an object surface; a return prism for polarizing and separating light from the first optical system; a second optical system which is disposed along one optical path of the light separated by the return prism; a first concave mirror which reflects light that has passed through the second optical system, causing said light to re-enter the return prism via the second optical system; a third optical system which is disposed along another optical path of the light separated by the return prism; a second concave mirror which reflects light that has passed through the third optical system, causing said light to re-enter the return prism via the third optical system; and a fourth optical system disposed along an optical path between the return prism and an image plane. The return prism guides the reflected light from the first and second concave mirrors to an image plane side, and the fourth optical system forms an image on the image plane using the reflected light emitted from the return prism. A marginal ray from the object surface enters substantially orthogonal to the return prism.
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Inventors:
Lee Tak
Tomohiro Hamawaki
Tomohiro Hamawaki
Application Number:
JP2011262110A
Publication Date:
November 09, 2016
Filing Date:
November 30, 2011
Export Citation:
Assignee:
Oak Manufacturing Co., Ltd.
International Classes:
G02B17/08; G02B19/00; G03F7/20; H01L21/027
Domestic Patent References:
| JP6181161A | ||||
| JP8179216A | ||||
| JP8055789A | ||||
| JP2011075595A |
Foreign References:
| WO2007108415A1 |
Attorney, Agent or Firm:
Takashi Matsuura
Hiroki Ogura
Hiroki Ogura