Title:
A projection exposure method and a projection aligner
Document Type and Number:
Japanese Patent JP6032833
Kind Code:
B2
Inventors:
Shigeru Yoshida
Ryo Ochiai
Yoshiyuki Enomoto
Ishiba Yukio
Ryo Ochiai
Yoshiyuki Enomoto
Ishiba Yukio
Application Number:
JP2012079178A
Publication Date:
November 30, 2016
Filing Date:
March 30, 2012
Export Citation:
Assignee:
Hakuto Co., Ltd.
International Classes:
G03F7/20; G03F9/02
Domestic Patent References:
| JP6151278A | ||||
| JP11204418A | ||||
| JP2207522A | ||||
| JP59155812A | ||||
| JP2004247767A | ||||
| JP9260269A |
Attorney, Agent or Firm:
Masafumi Miyao