Title:
ポンプ
Document Type and Number:
Japanese Patent JP6509176
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a pump having a seal to be rubbed, to overcome demerits in the prior art and to improve known solution, and capable of elongating a service life of the pump.SOLUTION: A pump 10, in particular, a vacuum pump has at least two transport elements 13, 16 relatively movable to each other, is tightly constituted while forming at least one transport chamber 24, has at least one seal 20 disposed on one of both transport elements, and has a slide layer 21 at least regionally formed on at least one of the transport elements to cooperate with each seal 20. The seal 20 has a polytetrafluoroethylene material including polyimide particles and manufactured by hot forming press and sintering, and the slide layer 21 has an oxide layer formed by anode oxidation in an electrolyte including oxalic acid.SELECTED DRAWING: Figure 1
Inventors:
Bernd Coach
Jonas Becker
Jonas Becker
Application Number:
JP2016196997A
Publication Date:
May 08, 2019
Filing Date:
October 05, 2016
Export Citation:
Assignee:
Pfeiffer Vacuum Game Behr
International Classes:
F04B37/16; F04C18/02; F04C25/02
Domestic Patent References:
| JP2005315142A | ||||
| JP62113882A | ||||
| JP2009108748A | ||||
| JP5172066A | ||||
| JP9042054A | ||||
| JP2005036198A | ||||
| JP2004210885A | ||||
| JP8261173A |
Foreign References:
| GB2130685A |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura
Kiyota Eisho
Blacksmith
Atsushi Shinohara
Shinsuke Nakamura
Kiyota Eisho