Title:
A purging device and a purging method
Document Type and Number:
Japanese Patent JP6241693
Kind Code:
B2
Abstract:
Containers are purged between overhead transfer vehicles and a container transfer place to or from which the containers are transferred. A travelling rail for a local vehicle is provided below a travelling rail for the overhead transfer vehicles and above the container transfer place, and a local vehicle provided with a hoist for raising and lowering the containers travels. A purging table for placing the containers is provided below the travelling rail for the local vehicle so as not to block a portion over the container transfer place and a purging gas feeding device feeds a purging gas into the containers supported on the purging table.
Inventors:
Iwasaki
Application Number:
JP2016550006A
Publication Date:
December 06, 2017
Filing Date:
July 23, 2015
Export Citation:
Assignee:
Murata Machinery Co., Ltd.
International Classes:
B65G1/00; H01L21/677
Domestic Patent References:
| JP2012114406A |
Foreign References:
| WO2012160917A1 |
Attorney, Agent or Firm:
Akira Shioiri
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