Title:
ガス増幅を用いた放射線検出器、ガス増幅を用いた放射線検出器の製造方法、及びガス増幅を用いた放射線検出器による放射線検出方法
Document Type and Number:
Japanese Patent JP6665858
Kind Code:
B2
Abstract:
A radiation detector using gas amplification, includes: an insulator having a first surface and a second surface positioned at a back surface side of the first surface; a first electrode layer that is provided on the first surface of the insulator and has a circular opening portion; a pixel electrode positioned inside the opening portion; a second electrode layer provided on the second surface of the insulator; and a via hole conductor that has one end surface thereof bonded to the second electrode layer through the interior of the insulator and has the other end surface thereof bonded to the pixel electrode, in which at least a part of the other end surface side of the via hole conductor exhibits a column or truncated cone shape and an outer diameter of the via hole conductor becomes smallest at the one end surface.
Inventors:
Kohei Ota
Tomohisa Motomura
Motoki Ohno
Tomohisa Motomura
Motoki Ohno
Application Number:
JP2017512197A
Publication Date:
March 13, 2020
Filing Date:
April 12, 2016
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
G01T1/18; H01J47/06
Domestic Patent References:
| JP200778653A | ||||
| JP201311623A | ||||
| JP200290465A |
Attorney, Agent or Firm:
Patent Business Corporation Sakura International Patent Office