Title:
マグネトロン容量結合型プラズマによる気化性金属化合物からの高純度金属の還元精製方法及びそのための装置
Document Type and Number:
Japanese Patent JP4295823
Kind Code:
B2
Inventors:
Nobuyuki Mori
Kamijo
Takashi Takada
Sasaki Masatoshi
Nakajima Hisashi
Rev. Tokuhiro
Ujiie Yoshiharu
Chiaki Ouchi
Kamijo
Takashi Takada
Sasaki Masatoshi
Nakajima Hisashi
Rev. Tokuhiro
Ujiie Yoshiharu
Chiaki Ouchi
Application Number:
JP2003156944A
Publication Date:
July 15, 2009
Filing Date:
June 02, 2003
Export Citation:
Assignee:
UM Technology-Co., Ltd.
International Classes:
C01B33/02; C22B9/22; B22F9/14; C22B34/12; F27D11/12
Domestic Patent References:
| JP2002118000A | ||||
| JP60070135A | ||||
| JP2003100720A |
Attorney, Agent or Firm:
Takao Iriko
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