Title:
レジスト組成物、レジストパターン形成方法、化合物、酸発生剤
Document Type and Number:
Japanese Patent JP5401597
Kind Code:
B2
Inventors:
Akinari Kawakami
Yoshiyuki Utsumi
Hideo Haneda
Nakamura 剛
Hiroaki Shimizu
Keita Ishizuka
Takehiro Seshimo
Kensuke Matsuzawa
Yoshiyuki Utsumi
Hideo Haneda
Nakamura 剛
Hiroaki Shimizu
Keita Ishizuka
Takehiro Seshimo
Kensuke Matsuzawa
Application Number:
JP2012268855A
Publication Date:
January 29, 2014
Filing Date:
December 07, 2012
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO., LTD.
International Classes:
G03F7/004; C07C309/04; C07C309/07; C07C309/10; C07C309/11; C07C309/17; C07C311/48; C07C311/51; C07C381/12; C07D213/79; C07D285/00; C07D327/04; C07D493/18; C08F20/18; C08F20/36; C09K3/00; G03F7/039
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Mitsuyoshi Suzuki
Igarashi Mitsunaga
Masatake Shiga
Mitsuyoshi Suzuki
Igarashi Mitsunaga