Title:
A semiconductor device which has fin FET structure, and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6251604
Kind Code:
B2
More Like This:
Inventors:
Shunji Nagumo
Application Number:
JP2014041530A
Publication Date:
December 20, 2017
Filing Date:
March 04, 2014
Export Citation:
Assignee:
Renesas Electronics Corporation
International Classes:
H01L21/8238; H01L21/20; H01L21/302; H01L21/3065; H01L27/088; H01L27/092; H01L29/786
Domestic Patent References:
JP2008147366A | ||||
JP2010537433A | ||||
JP2007258485A | ||||
JP2014505995A | ||||
JP201073869A |
Foreign References:
WO2005022637A1 | ||||
US20050218427 | ||||
WO2005106949A1 | ||||
US20070254423 | ||||
WO2005036651A1 |
Attorney, Agent or Firm:
Shinji Hayami
Satoshi Amagi
Satoshi Amagi