Title:
A semiconductor photo acceptance unit and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6048578
Kind Code:
B2
Inventors:
Okumura Shigekazu
Application Number:
JP2015512264A
Publication Date:
December 21, 2016
Filing Date:
April 19, 2013
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L31/10
Domestic Patent References:
| JP2010271422A | 2010-12-02 |
Foreign References:
| US20070104411A1 | 2007-05-10 | |||
| WO2008080428A1 | 2008-07-10 |
Other References:
JPN6016040280; Ｔａｏ Ｙｉｎ ｅｔ ａｌ．: '"３１ＧＨｚ Ｇｅ ｎ-ｉ-ｐ ｗａｖｅｇｕｉｄｅ ｐｈｏｔｏｄｅｔｅｃｔｏｒｓ ｏｎ Ｓｉｌｉｃｏｎ-ｏｎ-Ｉｎｓｕｌａｔｏｒ ｓｕｂｓｔｒａｔｅ"' Ｏｐｔｉｃｓ Ｅｘｐｒｅｓｓ Ｖｏｌ．１５， Ｎｏ．２１, 2007, ｐ．１３９６５-１３９７１
Attorney, Agent or Firm:
Kenji Doi
Hayashi Tsunetoku
Manabe Kiyoshi
Hayashi Tsunetoku
Manabe Kiyoshi
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