Title:
感活性光線性又は感放射線性樹脂組成物、並びに、それを用いたレジスト膜及びパターン形成方法
Document Type and Number:
Japanese Patent JP5723685
Kind Code:
B2
Inventors:
Takeshi Kawabata
Hidetomo Takahashi
Tomotaka Tsuchimura
Hirano Osamu
Hideaki Tsubaki
Hidetomo Takahashi
Tomotaka Tsuchimura
Hirano Osamu
Hideaki Tsubaki
Application Number:
JP2011131381A
Publication Date:
May 27, 2015
Filing Date:
June 13, 2011
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/004; C08F212/14; G03F7/039; H01L21/027
Domestic Patent References:
| JP2010150367A | ||||
| JP2002174893A | ||||
| JP2010085971A | ||||
| JP2009101694A | ||||
| JP2010077377A | ||||
| JP2011178988A |
Foreign References:
| WO2008056796A1 |
Attorney, Agent or Firm:
Takeshi Takamatsu
Toshiyuki Ozawa
Hasegawa Hiromichi
Toshiyuki Ozawa
Hasegawa Hiromichi