Title:
感活性光線性又は感放射線性樹脂組成物、該組成物を用いた感活性光線性又は感放射線性膜及びパターン形成方法、並びに電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP5887300
Kind Code:
B2
More Like This:
Inventors:
Kenyo Goto
Shuhei Yamaguchi
Tomoda Matsuda
Kataoka Shohei
Akinori Shibuya
Dan Gou
Keita Kato
Shirakawa Mitsuhiro
Shuhei Yamaguchi
Tomoda Matsuda
Kataoka Shohei
Akinori Shibuya
Dan Gou
Keita Kato
Shirakawa Mitsuhiro
Application Number:
JP2013119288A
Publication Date:
March 16, 2016
Filing Date:
June 05, 2013
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
G03F7/004; C07C309/04; C07C309/12; C07C309/17; C07C311/03; C07D279/12; C07D295/22; C07D319/18; C07D327/06; C07D411/04; C08F20/12; C09K3/00; G03F7/038; G03F7/039
Domestic Patent References:
| JP2003207884A | ||||
| JP9137059A | ||||
| JP2012214442A | ||||
| JP2003140332A | ||||
| JP2010100604A | ||||
| JP2014167611A |
Attorney, Agent or Firm:
Kurata Masatoshi
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Toshio Shirane
Takashi Mine
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Yoshihiro Fukuhara
Makoto Nakamura
Nobuhisa Nogawa
Toshio Shirane
Takashi Mine
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori