Title:
A sheet sticking device and a sticking method
Document Type and Number:
Japanese Patent JP5973203
Kind Code:
B2
Inventors:
Koji Kimura
Application Number:
JP2012077508A
Publication Date:
August 23, 2016
Filing Date:
March 29, 2012
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683; H01L21/301
Domestic Patent References:
| JP2011243886A | ||||
| JP9027466A | ||||
| JP2011029359A | ||||
| JP2008042016A | ||||
| JP2011151199A | ||||
| JP2007100039A | ||||
| JP61248724A |
Foreign References:
| US20020062921 |
Attorney, Agent or Firm:
Intellectual Property Office