Title:
シャワーヘッド
Document Type and Number:
Japanese Patent JP7099495
Kind Code:
B2
Abstract:
A showerhead provided in a chamber of a semiconductor manufacturing apparatus and facing a wafer holder includes: a plate-shaped ceramic substrate; a plurality of through holes penetrating the ceramic substrate in the direction of the thickness of the ceramic substrate; and a plurality of radio frequency conductors embedded in a plurality of zones, respectively, of the ceramic substrate, as seen on the side of a surface of the ceramic substrate facing the wafer holder.
Inventors:
Kimura Koichi
Akira Mikumo
Shigenobu Maeda
Akira Mikumo
Shigenobu Maeda
Application Number:
JP2020119855A
Publication Date:
July 12, 2022
Filing Date:
July 13, 2020
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/31; C04B35/581; C23C16/455; C23C16/505; H01L21/205; H01L21/3065
Domestic Patent References:
| JP2009218485A | ||||
| JP2008294016A | ||||
| JP2003524895A | ||||
| JP2001274103A | ||||
| JP2014170742A | ||||
| JP2005123159A | ||||
| JP6084812A |
Foreign References:
| WO2013031800A1 |
Attorney, Agent or Firm:
Fukami patent office