Title:
The source of X ray irradiation
Document Type and Number:
Japanese Patent JP5918571
Kind Code:
B2
Abstract:
In an X-ray radiation source (2), a case (31) and a rail member (4) are coupled via coupling members (41) having insulating properties, and a first facing surface (P1) and the rail member (4) are electrically isolated from each other. Thus, the effects of an induced current that flows through the rail (4) can be prevented from reaching the first facing surface (P1) when the X-ray radiation source (2) is connected to external equipment, and an object to be processed can be adequately neutralized without causing an electrostatic induction phenomenon. Furthermore, in the X-ray radiation source (2), given that the first facing surface (P1) comprises a metal, the first facing surface (P1) can be prevented from being charged due to the effects of potential that exists externally or in a high-voltage power supply module (22) for driving an X-ray tube (21), and the effects of neutralizing the object to be processed can be improved.
Inventors:
Norimasa Kosugi
Naoki Okumura
Nakamura Tatsuya
Fujita Sumi
Tomoyuki Okada
Ukishima Akiomi
Naoki Okumura
Nakamura Tatsuya
Fujita Sumi
Tomoyuki Okada
Ukishima Akiomi
Application Number:
JP2012046839A
Publication Date:
May 18, 2016
Filing Date:
March 02, 2012
Export Citation:
Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H05F3/06; G01N23/02; G21K5/02; G21K5/08
Domestic Patent References:
| JP2006338965A | ||||
| JP3004454U | ||||
| JP62033200U |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Satoru Ishida
Hiromitsu Nakayama
Yoshiki Kuroki
Satoru Ishida
Hiromitsu Nakayama