To provide a light switching electron source using no blanker and an electron beam drawing device using the same.
The light switching electron source 1 includes a light source 2, an electron generating unit 3 generating electrons by being irradiated with intermittent light from the light source 2, and the electron generating unit 3 includes an electron source 9 generating electrons by photoexitation, an electrode 7 drawing out the electrons from the electron source, a power source 8 drawing out the electrons. The electron source 9 can use a p-n junction or p-i-n junction 9a and the like, and a p-layer 6a or an n-layer 6b of the p-n junction 9a may have a protruded form. If the p-n junctions 9a are arranged in array, a plurality of electron beams 12 can be generated. Further, an electron beam shaping unit 4 may be disposed on the electron outgoing side of the electron generating unit 3. The electron beam shaping unit 4 can be constructed from an einzel lens 41, and a power source 11 for the einzel lens.
COPYRIGHT: (C)2011,JPO&INPIT
Takahito Ono
Masaki Esashi
Eiichi Tomono
Yusuke Kawai
Tetsuya Shinoda