A spatial light modulator, an exposure device, and a device manufacturing method

Japanese Patent JP5991601

B2

A spatial light modulator includes a first reflective surface which reflects incident light and is movable between a first position and a second position, the first and the second positions being located along a first axis, a second reflective surface which reflects the incident light, is arranged at a position where the second reflective surface is adjacent to the first reflective surface in a direction along a second axis crossing the first axis, and is movable between a third position and a fourth position, the third and the fourth positions being located along a direction parallel to the first axis, and a reflective part which reflects the incident light and is arranged between the first reflective surface and the second reflective surface in the direction along the second axis, wherein a distance between the first position and the reflective part, defined in the direction parallel to the first axis, is configured to attenuate light reflected at the reflective part by using light reflected at the first reflective surface, and a distance between the second position and the reflective part, defined in the direction parallel to the first axis, is configured to attenuate the light reflected at the reflective part by using the light reflected at the first reflective surface.

Soichi Yamato
Yoji Watanabe
Tomoharu Fujiwara

JP2015067542A

September 14, 2016

March 27, 2015

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NIKON CORPORATION

G03F7/20; G02B26/06

JP2008235909A
JP2005123586A
JP2003015123A
JP2007522485A

WO2003065103A1

Satoshi Omori

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