Title:
空間光変調器、露光装置およびそれらの製造方法
Document Type and Number:
Japanese Patent JP5549222
Kind Code:
B2
Inventors:
Yoshihiko Suzuki
Hiroshi Konishi
Suzuki Pure child
Hiroshi Konishi
Suzuki Pure child
Application Number:
JP2009298843A
Publication Date:
July 16, 2014
Filing Date:
December 28, 2009
Export Citation:
Assignee:
NIKON CORP.
International Classes:
G02B26/08; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Ryuka international patent business corporation