Title:
Sputtering equipment and sputtering method
Document Type and Number:
Japanese Patent JP6299575
Kind Code:
B2
Inventors:
Judge Inazuki
Yoshio Kawai
Yoshio Kawai
Application Number:
JP2014247016A
Publication Date:
March 28, 2018
Filing Date:
December 05, 2014
Export Citation:
Assignee:
Shin-Etsu Chemical Co., Ltd.
International Classes:
C23C14/00; G03F1/50
Domestic Patent References:
| JP2009001912A | ||||
| JP2005200688A | ||||
| JP2013171273A | ||||
| JP9063960A | ||||
| JP2006307303A |
Foreign References:
| WO2011093334A1 |
Attorney, Agent or Firm:
Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki