Title:
ステージ装置およびリニアモータ、ならびに前記ステージ装置を用いた露光装置およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4137091
Kind Code:
B2
Inventors:
Nobu Shigeru Korenaga
Ryuichi Ebinuma
Ryuichi Ebinuma
Application Number:
JP2005165345A
Publication Date:
August 20, 2008
Filing Date:
June 06, 2005
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; G05D3/12; H01L21/027; H01L21/68; H02P7/00; H02P25/06
Domestic Patent References:
| JP4213707A |
Attorney, Agent or Firm:
Kazunori Saito
Tetsuya Ito
Tetsuya Ito