Title:
A stage device, a sample conveying machine, and a positioning control method
Document Type and Number:
Japanese Patent JP6113429
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To allow accurate positioning constantly even when slide surface characteristics are nonlinearly varied in accordance with driving conditions and secular changes.SOLUTION: A sample carrying device or a stage device includes: a carrying or moving mechanism including a slide mechanism; an actuator for driving the carrying or moving mechanism; an operation unit 201 which has a function of learning the relation between initial driving conditions and an amount of stop error to a target position and estimates the amount of stop error from the initial driving conditions; and a control unit 200 which operates an actual driving condition of the actuator on the basis of the target position as one of initial driving conditions and the estimated amount of stop error and controls the actuator.
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Inventors:
Keiya Sato
Kazuhiro Morita
Kazuhiro Morita
Application Number:
JP2012163520A
Publication Date:
April 12, 2017
Filing Date:
July 24, 2012
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G05D3/12; G05B13/02; H01J37/20; H01L21/68
Domestic Patent References:
| JP11271184A | ||||
| JP7036506A | ||||
| JP2001102429A |
Attorney, Agent or Firm:
Yusuke Hiraki
Sekiya Mitsuo
Toshiaki Watanabe
Sekiya Mitsuo
Toshiaki Watanabe