Title:
A substrate processing device, a program, and a recording medium
Document Type and Number:
Japanese Patent JP6045946
Kind Code:
B2
Abstract:
A substrate processing apparatus includes a sealed container which interiorly has a space for housing substrates and is provided with an opening for introducing or discharging the substrates, an opening/closing mechanism for opening and closing the opening, a substrate processing part for performing cleaning process on the substrates, and a first transfer robot for discharging and introducing the substrates from and into the sealed container. Further, the substrate processing apparatus includes a schedule creating part adapted to create schedule data which defines timings at which the opening/closing mechanism opens and closes the opening, and timings at which the substrate transferring part introduces the substrates in the sealed container or discharges the substrates from the sealed container, according to time periods of processing of the substrates into the substrate processing part.
Inventors:
Masahiro Yamamoto
Application Number:
JP2013048988A
Publication Date:
December 14, 2016
Filing Date:
March 12, 2013
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/677; H01L21/02; H01L21/304
Domestic Patent References:
| JP10203610A | ||||
| JP2001210700A | ||||
| JP2012114448A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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