Title:
A substrate processing device and a substrate treating method
Document Type and Number:
Japanese Patent JP6022933
Kind Code:
B2
Inventors:
Takashi Kakimura
Application Number:
JP2012286780A
Publication Date:
November 09, 2016
Filing Date:
December 28, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/683; B05C13/02; H01L21/027
Domestic Patent References:
| JP2004040046A | ||||
| JP4065895A | ||||
| JP7074231A | ||||
| JP7007072A | ||||
| JP2008028253A | ||||
| JP2009246229A | ||||
| JP2011230112A | ||||
| JP2005072559A | ||||
| JP2002313895A | ||||
| JP2009164040A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita
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