Title:
A substrate processing device and a substrate treating method
Document Type and Number:
Japanese Patent JP6118044
Kind Code:
B2
Abstract:
A substrate is transported based on coordinates information indicating a receiving position of the substrate and a placement position of the substrate by a hand. If the substrate is shifted from a first position, the substrate is received by the hand while a center of the substrate is shifted from a normal position of the hand. The hand that holds the substrate is moved toward a second position. A plurality of portions at an outer periphery of the substrate are detected before the substrate is placed. A shift of the substrate with respect to the normal position of the hand is detected based on the detection result, and the coordinates information is corrected such that a shift between a position of the center of the substrate to be placed at the second position by the hand and the center of the second position is canceled.
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Inventors:
Mulberry Joji Hara
Takashi Taguchi
Kashiwayama Masato
Kohei Iwasaki
Takashi Taguchi
Kashiwayama Masato
Kohei Iwasaki
Application Number:
JP2012160395A
Publication Date:
April 19, 2017
Filing Date:
July 19, 2012
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
Screen Semiconductor Solutions Co., Ltd.
Screen Semiconductor Solutions Co., Ltd.
International Classes:
H01L21/677; H01L21/027
Domestic Patent References:
| JP2008311303A | ||||
| JP2009071008A | ||||
| JP2012182393A | ||||
| JP11195686A | ||||
| JP2002043394A | ||||
| JP2009064807A | ||||
| JP2008053643A | ||||
| JP2011242534A |
Foreign References:
| US20100085582 |
Attorney, Agent or Firm:
Yoshito Fukushima