Title:
A substrate transport device accompanied by a plurality of independent movable arms
Document Type and Number:
Japanese Patent JP6027072
Kind Code:
B2
Abstract:
A substrate transport apparatus including a drive section having at least one drive shaft and at least two scara arms operably coupled to the at least one drive shaft, the at least one drive shaft being a common drive shaft for the at least two scara arms effecting extension and retraction of the at least two scara arms, wherein the at least two scara arms are coupled to each other so that, with the at least one drive shaft coupled to the at least two scara arms, rotation of the drive shaft effects extension and retraction of one of the at least two scara arms substantially independent of motion of another of the at least two scara arms.
Inventors:
Horsec Martin
Gilchrist Ulysses
Gilchrist Ulysses
Application Number:
JP2014224566A
Publication Date:
November 16, 2016
Filing Date:
November 04, 2014
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
H01L21/677; B25J9/06; B65G49/06; B65G49/07
Domestic Patent References:
| JP2005229087A | ||||
| JP7227777A | ||||
| JP200613371A | ||||
| JP2002361577A | ||||
| JP2006120659A |
Attorney, Agent or Firm:
Motohiko Fujimura