Title:
A substrate transport device which has a different maintenance end effector
Document Type and Number:
Japanese Patent JP6123104
Kind Code:
B2
Abstract:
A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.
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Inventors:
Hoffmeister Christopher A.
Application Number:
JP2010166098A
Publication Date:
May 10, 2017
Filing Date:
July 23, 2010
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
B25J9/06; H01L21/677; B25J9/10; B65G49/07; H01L21/687
Domestic Patent References:
| JP6349930A | ||||
| JP479253A | ||||
| JP3227036A |
Attorney, Agent or Firm:
Motohiko Fujimura