Title:
A substrate treating method, a substrate treatment system, and a storage
Document Type and Number:
Japanese Patent JP6142059
Kind Code:
B2
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Inventors:
Tomoyuki Sugano
Kaneko capital
Takehiko Orii
Kaneko capital
Takehiko Orii
Application Number:
JP2016196315A
Publication Date:
June 07, 2017
Filing Date:
October 04, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/3065; H01L21/02; H01L21/304
Domestic Patent References:
| JP2008060368A | ||||
| JP2008124226A | ||||
| JP2006186081A | ||||
| JP2010114414A | ||||
| JP2007142331A | ||||
| JP2006056522A | ||||
| JP2012169441A |
Foreign References:
| WO2010032616A1 |
Attorney, Agent or Firm:
Sakai International Patent Office