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Title:
A substrate treatment system and a substrate reserving gear
Document Type and Number:
Japanese Patent JP6064684
Kind Code:
B2
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Inventors:
Toru Naruo
Application Number:
JP2013043127A
Publication Date:
January 25, 2017
Filing Date:
March 05, 2013
Export Citation:
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Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
H01L21/677; B65H15/00
Domestic Patent References:
JP6298650U
JP625246U
JP1147344U
JP4956363A
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita



 
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