Title:
A substrate with a double layer coat, and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6246567
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a production method of a substrate with a multilayer coating film capable of forming a coating film excellent in plasma resistance without generating a crack on a brittle substrate.SOLUTION: A production method of a substrate with a multilayer coating film includes a first coating film formation step for forming a first coating film on the surface of a brittle substrate by performing plasma spray by using first base powder mainly composed of ceramic particles, and a second coating film formation step for forming a second coating film on the surface of the first coating film by performing flame spray by using slurry formed by dispersing second base powder mainly composed of ceramic particles into an organic solvent.
Inventors:
Ryoichi Yamamoto
Issei Ishida
Takashi Kawai
Tetsuya Ishikawa
Koichi Ishikawa
Issei Ishida
Takashi Kawai
Tetsuya Ishikawa
Koichi Ishikawa
Application Number:
JP2013236213A
Publication Date:
December 13, 2017
Filing Date:
November 14, 2013
Export Citation:
Assignee:
Gunma Prefecture
Ribaston Industry Co., Ltd.
Ribaston Industry Co., Ltd.
International Classes:
C23C4/12; B32B18/00; C23C4/10; H01L21/3065
Domestic Patent References:
| JP2003212598A | ||||
| JP2007277620A | ||||
| JP2006108178A | ||||
| JP2007107100A | ||||
| JP2009161848A | ||||
| JP2005126768A | ||||
| JP2004018299A | ||||
| JP2010242204A | ||||
| JP2011256465A | ||||
| JP2010150617A |
Foreign References:
| WO2013176168A1 | ||||
| WO2010027073A1 | ||||
| US20060037536 | ||||
| US20120103519 |
Attorney, Agent or Firm:
Shunsuke Umeda
Takahashi politics
Takahashi politics
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