A surface position sensing device and a surface position detection method

Title:

A surface position sensing device and a surface position detection method

Document Type and Number:

Japanese Patent JP6131088

Kind Code:

B2

Inventors:

Ihara Ikuo
Ichimura Masatoshi
Yoshiyuki Shimazaki

Application Number:

JP2013085096A

Publication Date:

May 17, 2017

Filing Date:

April 15, 2013

Export Citation:

Assignee:

Nippon Seiki Co., Ltd.
Nagaoka University of Technology

International Classes:

G01F23/22

Domestic Patent References:

JP4086525A
JP2004061233A

Attorney, Agent or Firm:

Kimura Mitsuru

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