Title:
SURFACE TREATMENT DEVICE AND SURFACE TREATMENT METHOD
Document Type and Number:
Japanese Patent JP2017154196
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide devices and methods for treating the surface of a workpiece to improve the wear resistance of the workpiece.SOLUTION: A chip 1 is disposed to face a workpiece W. A gap between the chip 1 and the workpiece W is supplied with process liquid Q. A high frequency pulse voltage is further applied between the chip 1 and the workpiece W.SELECTED DRAWING: Figure 1
Inventors:
TACHIBANA TORU
KOBAYASHI SATOSHI
MURAKOSHI CHIKA
KOIKE KAZUNORI
KURIYAGAWA TSUNEMOTO
MIZUTANI MASAYOSHI
KOBAYASHI SATOSHI
MURAKOSHI CHIKA
KOIKE KAZUNORI
KURIYAGAWA TSUNEMOTO
MIZUTANI MASAYOSHI
Application Number:
JP2016037742A
Publication Date:
September 07, 2017
Filing Date:
February 29, 2016
Export Citation:
Assignee:
MICRON MACHINERY
UNIV TOHOKU
UNIV TOHOKU
International Classes:
B23H9/00; B23H3/06; B23H3/08; B23H5/02; B23H7/38
Domestic Patent References:
| JPH0919829A | 1997-01-21 | |||
| JPH01500983A | 1989-04-06 | |||
| JP2004237413A | 2004-08-26 | |||
| JP2009241238A | 2009-10-22 | |||
| JP2000160361A | 2000-06-13 | |||
| JP2005245817A | 2005-09-15 | |||
| JP2014147870A | 2014-08-21 | |||
| JP2006043642A | 2006-02-16 |
Attorney, Agent or Firm:
Creation International Patent Office