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Title:
A susceptor and its manufacturing method
Document Type and Number:
Japanese Patent JP6233209
Kind Code:
B2
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Inventors:
Todo Morihiro
Hiroaki Maki
Shinji Tsukamoto
Masanori Ogawa
Application Number:
JP2014133928A
Publication Date:
November 22, 2017
Filing Date:
June 30, 2014
Export Citation:
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Assignee:
Toyoda Gosei Co., Ltd.
International Classes:
H01L21/683; H01L21/205
Domestic Patent References:
JP2011204787A
JP2008274437A
JP63252381A
JP2012178557A
JP2003110011A
JP4228495A
Foreign References:
US6740167
Attorney, Agent or Firm:
Osamu Fujitani
Akinori Isshiki



 
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